System and method for driving an industrial control device

ABSTRACT

A process control apparatus including an actuator configured to effect changes in an industrial process, a power supply, a plurality of current switches coupled between the actuator and the power supply and a controller coupled to the plurality of current switches. The controller is configured to selectively close one or more of the plurality of current switches so as to provide a selectable level of current from the power supply to the actuator. In variations, a plurality of discharge switches are coupled to the actuator and the controller is configured to selectively close the discharge switches so as to provide a selectable level of charge to discharge from the actuator.

PRIORITY

This application is a continuation of U.S. patent application Ser. No.11/177,814 filed on Jul. 8, 2005 now U.S. Pat. No. 7,394,639 entitledSystem and method for Driving an Industrial Control Device, which isincorporated by reference in its entirety.

RELATED APPLICATIONS

The present application is related to commonly owned and assignedapplication Ser. No. 10/985,775, entitled REACTIVE LOAD RESONANT DRIVECIRCUIT, which is incorporated herein by reference.

FIELD OF THE INVENTION

The present invention relates to control systems, and in particular, butnot by way of limitation, the present invention relates to systems andmethods for driving an actuator.

BACKGROUND OF THE INVENTION

Actuators are used in a variety of applications to control to one ormore aspects of an industrial process. For example, actuators are usedto operate mechanical valves that regulate the flow of materials in suchdiverse applications as automobile fuel injectors, hydraulicservovalves, and ink jet printer nozzles. One particular type ofactuator is a piezoelectric actuator, which is a nano-positioning devicethat deforms its shape in response to a stimulus of electrical charge

In gas delivery applications, particularly those involving high-speedprocesses, the time required to actuate a control valve can directlyaffect the performance of a mass flow controller. A typical mass flowcontroller product stimulates a piezoelectric actuator by transferringcharge from a power source to the actuator load. Charge transfer ratecan be increased by increasing the peak current. The speed of chargetransfer is limited, however, by peak current stresses placed on theinternal bond wires connecting the drive circuit to the piezoelectricactuator, as well as by practical considerations of the cost, size, andelectrical isolation of high-current switches and other components.

As a result, contemporary mass flow controller devices tend to haverelatively slow actuation times—on the order of several hundredmilliseconds. For many process applications, these actuation timesimpose an undesirable lower limit on the open time, or upper limit onthe repetition rate at which the controller may be operated.

As an alternative to in-line mass flow control, a mass flow diverter maybe employed in applications requiring higher speed control of minutefeed gas quantities. In this approach, a pneumatically actuated valve islocated on a gas stream conduit venting continuously from, a source. Toinject a quantity of gas into a process, the valve is driven rapidly toa position that diverts the stream into the process environment, andthen returned rapidly to the venting position. Use of high-speedpneumatics to drive the diverter valve allows For short actuation times(on the order of tens of milliseconds) and therefore greater controlover the delivered gas quantity. In addition to the added cost andcomplexity of this approach, another significant disadvantage is thatthe vented material often cannot be recovered due to contaminationconcerns. For many processes, particularly in the manufacture ofsemiconductor devices, this can result in significant waste of expensivereed gas materials along with all attendant need for scrubbing orabating greater quantities of the gases downstream of the process.

Although present devices are functional to an extent, they are notsufficiently responsive or otherwise satisfactory. Accordingly, a systemand method are needed to address the shortfalls of present technologyand to provide other new and innovative features.

SUMMARY OF THE INVENTION

Exemplary embodiments of the present invention that are shown in thedrawings are summarized below. These and other embodiments are morefully described in the Detailed Description section. It is to beunderstood, however, that there is no intention to limit the inventionto the forms described in this Summary of the Invention or in theDetailed Description. One skilled in the art can recognize that thereare numerous modifications, equivalents and alternative constructionsthat fall within the spirit and scope of the invention as expressed inthe claims.

In one exemplary embodiment, the present invention may be characterizedas a process control apparatus that includes an actuator configured toeffect changes in an industrial process, a power supply, a plurality ofcurrent switches coupled between the actuator and the power supply and acontroller coupled to the plurality of current switches. The controllerin this embodiment is configured to selectively close one or more of theplurality of current switches so as to provide a selectable level ofcurrent from the power supply to the actuator.

In another embodiment, the invention may be characterized as a methodfor driving an actuator to a desired position, the method includingreceiving a control signal that is indicative of the desired position,selecting, from among potential current levels, a particular currentlevel, wherein the particular current level is related to an amount oftime required to drive the actuator from an actual position to a desiredposition and providing a drive current at the particular current levelto the actuator.

In yet another embodiment, the invention may be characterized as aprocess control apparatus that includes an actuator configured so as tobe capable of altering an industrial process. The apparatus in thisembodiment includes means for receiving a control signal that isindicative of a desired position of the actuator and means forselecting, from among a plurality of potential current levels, aparticular current level to drive the actuator from an actual positionto a desired position.

As previously stated, the above-described embodiments andimplementations are for illustration purposes only. Numerous otherembodiments, implementations, and details of the invention are easilyrecognized by those of skill in the art from the following descriptionsand claims.

BRIEF DESCRIPTION OF THE DRAWINGS

Various objects and advantages and a more complete understanding of thepresent invention are apparent and more readily appreciated by referenceto the following Detailed Description and to the appended claims whentaken in conjunction with the accompanying Drawings wherein:

FIG. 1 is a block diagram depicting a control device in accordance withexemplary embodiments of the present invention;

FIG. 2 is a flowchart depicting steps carried out by the control deviceof FIG. 1 according to several embodiments of the invention; and

FIG. 3 is one embodiment of the control device of FIG. 1.

DETAILED DESCRIPTION

Referring now to the drawings, where like or similar elements aredesignated with identical reference numerals throughout the severalviews, and referring in particular to FIG. 1, it illustrates a controldevice 100 in accordance with exemplary embodiments of the presentinvention.

As shown, the control device 100 in the present embodiment includes acontroller 102 that is coupled both to N charge switches 104 and Mdischarging switches 106. Each of the N charge switches 104 is coupledbetween a power supply 108 and an actuator 110 so that each of the Ncharge switches 104 is capable of forming one of N current paths betweenthe power supply 108 and the actuator 110. As shown, each of the Mdischarge switches 106 in this embodiment is coupled between ground andthe actuator 110 so that each of the M discharge switches 106 is capableof forming one of M current paths between ground and the actuator 110.

Also shown coupled to the controller 102 are a feedback line 112 and acontrol line 114. The feedback line 112 is coupled between the actuator110 and the controller 102 so as to provide a signal to the controller102 indicative of a status of the actuator 110. Although depicted asbeing coupled to the actuator 110 in the present embodiment, it shouldbe recognized that the feedback line 112 in other embodiments may becoupled to a sensor (e.g., a mass flow sensor) that monitors the effectof the actuators movement. The control line 114 in the exemplaryembodiment is coupled to the controller 102 so as to allow a controlsignal, which is indicative of a desired actuator position, to be sentto the controller 102.

The control device 100 depicted in FIG. 1 may be operated in a varietyof ways to provide a level of current to the actuator 100 that isselected to provide improved response time and/or improved control tothe actuator. For example, any one of the charge switches 104 may beclosed at a time or any combination of two or more the charge switches104 may be operated simultaneously so as to provide a dynamic level ofcurrent to the actuator 110 in accordance with the position of theactuator 110.

For instance, if the actuator 110 needs to move a substantial distanceto reach a desired control position, some or all of the charge switches104 may be closed so as to provide a higher level of current to theactuator 110. Similarly, if the actuator 110 is relatively close to adesired control position, only one of the charge switches 104 may beclosed to drive the actuator 110 with a lower level of current. Inaccordance with several embodiments, the number of charge switches 104activated is dynamically varied on an ongoing basis to provide both goodcontrol and improved response time.

In several embodiments, the number of switches 104 that aresimultaneously closed is related to an amount of time required to movethe actuator 110 from an actual position to a desired position. In someembodiments for example, the number of charge switches 104 initiallyactivated (e.g., closed) is a function of the difference between theinitial position of the actuator and the desired position of theactuator. In these embodiments, either a look up table may be employedto determine how many switches 104 should be initially closed or acalculation may be utilized to determine the number of switches. Inother embodiments, one or a relatively small number charge switches 104is initially closed, and the status of the actuator 110 is monitored sothat if the actuator has not arrived at the desired position after aperiod of time, one or more additional current switches 104 are employedto increase the rate of movement of the actuator 110.

In a similar manner, when the actuator 110 is a type of actuator 110that must be discharged to perform a full range of directional movement(e.g., a piezoelectric actuator), the discharge switches 106 may beoperated in accordance with the embodiments described above relative tothe charge switches 104. For example, any one of the discharge switches106 may be activated (e.g., closed) at a time or any combination of twoor more the discharge switches 106 may be simultaneously activated so asto provide a dynamic level of charge removal from the actuator 110.

Although the actuator 110 is described herein relative to severalembodiments as a piezoelectric actuator, the actuator 110 may berealized by a variety of actuators, which may include linear, tube,disk, or bimorph/polymorph actuators, as well as ultrasonic micromotorsor inchworm actuators, electromagnetic, polymer, or magnetostrictiveactuators, micro pumps or radial field diaphragms; solenoid or voicecoil actuators; or stepper motors. Similarly, one of ordinary skill inthe art will recognize that the control device 100 may be implemented asa variety of control devices including, but not limited to, a mass flowcontroller, flow shut-off device or a flow pressure regulator device.

The controller 102 may be implemented by a peripheral interfacecontroller (PIC), processor control, an application-specific integratedcircuit (ASIC) or a combination of analog and/or digital devices.

In the present embodiment, each of the N charge switches 104 may beimplemented as an impedance in series with a normally open switch. Asdiscussed further herein, each of the charge switches 104 may havedifferent impedances or one or more of the charge switches 104 may havethe same impedance. In some embodiments the switch utilized in each ofthe charge switches 104 is a transistor (e.g., bipolar or field effect)and the impedance is a resistor.

Similarly, each of the M discharge switches 104 may be implemented as animpedance in series with a normally open switch. As discussed furtherherein, each of the discharge switches 106 may have different impedancesor one or more of the discharge switches 106 may have the sameimpedance. The switch utilized in each of the discharge switches 106 maybe a transistor (e.g., bipolar or field effect) and the impedance may bea resistor. Although the discharge switches 106 in the presentembodiment couple the actuator 110 to ground, in a variation of thisembodiment, the discharge switches 106 couple the actuator to negativevoltage.

One of ordinary skill in the art will recognize that the specificimplementation of the power supply 108 may vary depending upon the typeof device utilized as the actuator 110. In one embodiment, where theactuator 110 is a piezoelectric actuator for example, the power supply108 is realized by well known components to provide a voltage between 0and 150 volts. In other embodiments, however, the power supply 108 isdesigned to provide substantially higher voltages (e.g., 170 volts orhigher).

Referring next to FIG. 2, shown is a flowchart depicting steps carriedout by the control device 100 of FIG. 1 when driving the actuator 110.As shown, the controller 102 initially receives a control signal via thecontrol line 114 that is indicative of a desired position of theactuator 110 (Blocks 202, 204). In one embodiment, where the actuator110 controls a control valve of a mass flow controller for example, thecontrol signal corresponds to a position of the actuator 110, whichprovides a specific mass flow.

As shown in FIG. 2, in response to the control signal, at least one ofthe N charge switches 104 is activated (e.g., closed) so as to allowcharge to be sent from the power supply 108, via the activated chargeswitch(es), to the actuator 110 (Blocks 206, 208). In the exemplaryembodiment, the feedback line 112 provides an indication of the effectof charge supplied to the actuator 110 (Block 210). In one embodiment,for example, the feedback line 112 is coupled to a voltage sensor at theactuator 110 to provide an indication of the amount of charge that theactuator 110 has received, which is indicative of the position of theactuator.

If additional charge is desired to be transferred to the actuator 110(e.g., because the voltage of the actuator 110 is not sufficient todrive the actuator to the desired position)(Block 212), then another ofthe charge switches 104 is activated (e.g., closed) so as to sendadditional charge to the actuator 110 (Block 214), and the effect of theadditional charge on the actuator 110 is determined (Block 210).

If less charge is desired to be sent to the actuator 110 (e.g., becausethe actuator 110 is expected to be at the desired position when there isless charge on the actuator)(Block 216) then at least one of thedischarge switches 106 is activated (e.g., closed) so as to drain chargefrom the actuator 110 (Block 218).

As shown in FIG. 2, Blocks 210-218 are carried out until the actuator110 reaches the desired position (Block 220). The charge is thenmaintained until another control signal is received (Block 204).

Referring next to FIG. 3, shown is one embodiment of the control deviceof FIG. 1 implemented with two charge switches 304A, 304B and twodischarge switches 306A, 306B. As shown in FIG. 3, a controller 302, apower supply 308, two charge switches 304A, 304B and two dischargeswitches 306A, 306B are exemplary embodiments of the controller 102, thepower supply 108, the N charge switches 104 and the M discharge switches106 depicted in FIG. 1, respectively.

The charge switches 304A, 304B in this embodiment include a low chargeswitch 304A and a high charge switch 304B. The low charge switch 304A isconfigured to provide a lower level of current to an actuator (not shownin FIG. 3) so as to allow the amount of charge provided to the actuator(e.g., the actuator 110) to be finely tuned. In this way, the actuatormay be accurately driven with a low level of power. The high currentswitch 304B is configured to provide a higher level of current to theactuator so as to provide an improved response from the actuator (e.g.,a faster response).

As shown, the low current switch 304A includes a bipolar transistor 324configured so as to create a normally open emitter-collector currentpath that is in series with a 10K Ohm impedance. In the high currentswitch 304B, a bipolar transistor 326 is configured so as to create anormally open emitter-collector current path that is in series with 2KOhms of impedance (two 1K Ohm resistors). As a consequence, the highcurrent switch 304B, with a lower resistance path, passes a higher levelof current from the power supply 308 than the low current switch 304A.

The discharge switches 306A, 306B in this embodiment include a lowdischarge switch 306A and a high discharge switch 306B. As shown in FIG.3, these switches are configured in much the same way as the low andhigh charge switches 304A, 304B except that the discharge switches 306A,306B couple the actuator to ground when activated instead of the powersupply 308.

As shown in the embodiment depicted in FIG. 3, the controller 302 isimplemented by a combination of analog and digital components.Specifically, a comparator compares a feedback 312 signal with a controlsignal 314 to provide an analog signal 316 that is indicative of adifference between an actual level of charge on the actuator and adesired level of charge on the actuator. This analog difference signalis then converted to a digital signal 320 by a comparator 318

In the exemplary embodiment depicted in FIG. 3, a clock 322 is utilizedto effectuate periodic monitoring of the amount of charge at theactuator. Specifically, as shown in FIG. 3, each of the switches 304A,304B, 306A, 306B is coupled to a corresponding D flip-flop, and each Dflip-flop is coupled to the clock 322.

In operation, when a control signal 314 dictates a change in theposition of the actuator so as to require current to be provided to theactuator, only the low current switch 304A is initially activated (i.e.,the emitter-collector path of transistor 324 is conductive). If thecharge in the actuator is not at the desired level (as indicated by avoltage of the feedback signal 312), after a half cycle of the clocksignal, then the high current switch 304B is also activated so that bothswitches 304A, 304B are providing current to the actuator.

In this way, if the actuator is sufficiently close to the desired chargelevel, the low charge switch 304A will provide enough current to theactuator to raise the charge level of the actuator to the desired levelwithout the use of the high charge switch 304B. If, however, the chargeon the actuator is not close enough to the desired level after chargingthe actuator with the low charge switch 304A for a half clock cycle,then the high charge switch 304B is activated simultaneously with thelow charge switch 304A so as to increase the amount of current suppliedto the actuator. In one embodiment, the clock 322 is configured togenerate a 10 KHz clock signal, but this is certainly not required.

In a similar manner, when a desired change in the position of theactuator requires charge to be removed from the actuator, the lowdischarge switch 306A is initially activated so as to discharge currentfrom the actuator. If the charge on the actuator is still to high aftera half clock cycle, the high discharge switch 306B is activated so thatcharge is removed from the actuator via both the high and low dischargeswitches 306B, 306A so as to quickly remove charge from the actuator andimprove response time.

Although the control device depicted in FIG. 3 includes two chargeswitches 304A, 304B and two discharge switches 306A, 306B in otherembodiments, additional charge switches and discharge switches areincluded within the same architectural framework depicted in FIG. 3. Inthese embodiments, if the charge at the actuator has not been reached ateach successive half period of the clock signal, then an additionalcharge switch is closed so as to provide increasing levels of current tothe actuator.

In one embodiment employing multiple charge switches, when the charge onthe actuator is approaching the desired charge level, one or moreswitches are closed in sequence as the charge on the actuator approachesthe desired charge level. In this way, the charge is provided to theactuator in an accurate and stable manner.

In conclusion, the present invention provides, among other things, asystem, apparatus and method for driving an actuator with a selectablelevel of current. Those skilled in the art can readily recognize thatnumerous variations and substitutions may be made in the invention, itsuse and its configuration to achieve substantially the same results asachieved by the embodiments described herein. Accordingly, there is nointention to limit the invention to the disclosed exemplary forms. Manyvariations, modifications and alternative constructions fall within thescope and spirit of the disclosed invention as expressed in the claims.

1. A mass flow controller comprising: a power supply; an actuatorconfigured to modulate a position of a flow control valve; an input lineconfigured to receive a control signal indicative of a specific massflow, the specific mass flow corresponding to a desired actuatorposition; a first current switch disposed to create a first current pathbetween the power supply and the actuator; a second current switchdisposed to create a second current path between the power supply andthe actuator; and a controller coupled to the first and second currentswitches, wherein the controller is configured to close both the firstand second current switches to simultaneously provide current to theactuator via the first and second current switches so as to provide adesired rate of increase of charge in the actuator, and the controlleris configured to initially close the first current switch and open thesecond current switch so as to initially provide current to the actuatorvia the first current switch, and the controller is configured to closethe second current switch in response to a rate of increase of charge inthe actuator being less than the desired rate.
 2. The mass flowcontroller of claim 1, including: a feedback line coupled to thecontroller and the actuator, the feedback line providing, to thecontroller, an indication of a level of charge on the actuator.
 3. Themass flow controller of claim 1, wherein the first current switch isconfigured to provide a lower level of current to the actuator than thesecond current switch.
 4. A mass flow controller comprising: a powersupply; an actuator configured to modulate a position of a flow controlvalve; an input line configured to receive a control signal indicativeof a specific mass flow, the specific mass flow corresponding to adesired actuator position; a first current switch disposed to create afirst current path between the power supply and the actuator; a secondcurrent switch disposed to create a second current path between thepower supply and the actuator; and a controller coupled to the first andsecond current switches, wherein the controller is configured tosimultaneously close both the first and second current switchesdepending upon a distance the actuator needs to move to reach thedesired actuator position, and the controller is configured to closeonly the first current switch when a position of the actuator isrelatively close to a desired control position.
 5. The mass flowcontroller of claim 4, including: a feedback line coupled to thecontroller and a mass flow sensor, the feedback line providing, to thecontroller, an indication of a mass flow through the control valve. 6.The mass flow controller of claim 4, including: a feedback line coupledto the controller and the actuator, the feedback line providing, to thecontroller, an indication of a position of the actuator.
 7. The massflow controller of claim 4, wherein the first current switch isconfigured to provide a lower level of current to the actuator than thesecond current switch.